Method of forming pattern by utilizing coatable inorganic...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making

Reexamination Certificate

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C430S905000, C427S380000, C427S402000, C427S414000

Reexamination Certificate

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07741004

ABSTRACT:
A coatable inorganic material is provided, which is suitable for being coated on a substrate in the form of sol-gel solution and then being directly written with thermochemical mode by using a laser beam. The coatable inorganic material is an oxide, in which the chemical element constitution is more than one element selected from Te, Al, Zr, and Ti.

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“Sub-10 nm Electron Beam Nanolithography Using Spin-Coatable TiO2 Resists”, by Saifullah et al., The Nanoscience Centre, Interdisciplinary Research Collaboration in Nanotechnology, University of Cambridge, Nano Letters, 2003 vol. 3, No. 11, 1587-1591.

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