Method of forming microfabricated cantilever stylus with integra

Details Method of forming microfabricated cantilever stylus with integra Method of forming microfabricated cantilever stylus with integra

1990-11-26

1993-06-22

Dang, Thi

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156657, 437228, H01L 21306

Patent

active

052214150

ABSTRACT:
A dielectric cantilever arm stylus with an integrally formed pyramidal tip is provided. The tip is molded in a pyramidal pit etched in a later-removed (100) silicon substrate. An integrally-formed cantilever arm is also formed as the tip is being formed. Various thin film materials form the cantilever arm and the tip. In one embodiment of the invention, the dielectric is silicon nitride. The cantilever arm is anodically bonded to a glass block.

REFERENCES:
patent: 4307507 (1981-12-01), Gray et al.
patent: 4685996 (1987-08-01), Busta et al.
patent: 4916002 (1990-04-01), Carver

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