Method of forming insulating layer and method of fabricating...

Details Method of forming insulating layer and method of fabricating... Method of forming insulating layer and method of fabricating...

2006-10-10

2006-10-10

Deo, Duy-Vu N (Department: 1765)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

On insulating substrate or layer

C438S151000, C438S152000, C438S153000, C438S164000

Reexamination Certificate

active

07118945

ABSTRACT:
A method of forming an insulating layer including preparing a substrate and depositing an insulating layer on the substrate such that density of a top portion of the insulating layer is different from that of a bottom portion of the insulating layer.

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