Method of forming images in a scanning electron microscope

Details Method of forming images in a scanning electron microscope Method of forming images in a scanning electron microscope

2006-09-12

2006-09-12

Lee, John R. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S306000, C250S307000, C250S3960ML

Reexamination Certificate

active

07105817

ABSTRACT:
An imaging device having many detector elements is used to construct multiple images of the surface of a specimen in a scanning electron microscope (SEM) using signals from different elements of the imaging device as the specimen is scanned a single time in the SEM.

REFERENCES:
patent: 5592563 (1997-01-01), Zahavi
patent: 6844550 (2005-01-01), Yin et al.
patent: 2005/0017173 (2005-01-01), Kumar

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