Method of forming conducting nanowires

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material

Reexamination Certificate

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C438S602000, C438S603000, C438S604000

Reexamination Certificate

active

07569470

ABSTRACT:
A method of preparing an array of conducting or semi-conducting nanowires may include forming a vicinal surface of stepped atomic terraces on a substrate, and depositing a fractional layer of dopant material to form nanostripes having a width less than the width of the atomic terraces. Diffusion of the atoms of the dopant nanostripes into the substrate may form the nanowires.

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Finnie et al., “Epitaxy: the motion picture.” Surface Science, vol. 500, Nr. 1-3, pp. 437-457, Dec. 2000.

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