Method of forming catalyst nanoparticles for nanowire growth...

Details Method of forming catalyst nanoparticles for nanowire growth... Method of forming catalyst nanoparticles for nanowire growth...

2008-05-27

2008-05-27

Louie, Wai-Sing (Department: 2814)

Semiconductor device manufacturing: process

Chemical etching

Combined with the removal of material by nonchemical means

C438S694000

Reexamination Certificate

active

07378347

ABSTRACT:
Methods for forming a predetermined pattern of catalytic regions having nanoscale dimensions are provided for use in the growth of nanowires. The methods include one or more nanoimprinting steps to produce arrays of catalytic nanoislands or nanoscale regions of catalytic material circumscribed by noncatalytic material.

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