Method of forming a zinc oxide coated article

Details Method of forming a zinc oxide coated article Method of forming a zinc oxide coated article

2007-05-03

2010-06-08

Deo, Duy-Vu N. (Department: 1792)

Coating processes

Coating by vapor, gas, or smoke

Mixture of vapors or gases utilized

C427S255190, C427S064000, C427S166000

Reexamination Certificate

active

07732013

ABSTRACT:
The invention described and claimed herein relates to a chemical vapor deposition process for depositing a zinc oxide coating on a substrate by delivering two gaseous precursor streams to a surface of the substrate, and mixing the gaseous precursor streams at the substrate surface for a time sufficiently short so as to form a zinc oxide coating at a deposition rate greater than 5 nm/second.

REFERENCES:
patent: 4751149 (1988-06-01), Vijayakumar et al.
patent: 5698262 (1997-12-01), Soubeyrand et al.
patent: 6238738 (2001-05-01), McCurdy
Hu et al. (Textured Fluorine-Doped ZnO films by Atmospheric CVD, Solar Cells, Elsevier, vol. 30, No. ¼ (1991), pp. 437-450).
Jeffrey et al. (Chemical Vapor Deposition Polymerization: published by Springer, 2003, pp. 14-15).
Hu, J., et al., “Textured Fluorine-Doped ZnO Films by Atmospheric Chemical Vapor Deposition and Their Use in Amorphous Silicon Solar Cells”, Solar Cells, Elsevier (Sequoia, S.A.) vol. 30. No. ¼ (1991), pp. 437-450.

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