Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate
2008-09-23
2008-09-23
Bella, Matthew C. (Department: 2624)
Image analysis
Applications
Manufacturing or product inspection
C382S147000, C382S149000, C382S154000
Reexamination Certificate
active
11180504
ABSTRACT:
In a method and apparatus for forming a three-dimensional image for an inspection pattern, a reference intensity function of an inspection X-ray is formed in accordance with a continuous scanning depth, and is differentiated with respect to the scanning depth. The differential reference intensity function is decomposed into a start function and a characteristic function. The differential reference intensity function is then repeatedly integrated while a temporary vertical profile function is substituted for the start function until the temporary intensity of a reference X-ray is within an allowable error range. The temporary vertical profile function satisfying the error range is selected as an optimal vertical profile function. A surface shape is combined to the optimal vertical profile function along a depth of the inspection pattern to thereby form the three-dimensional image for the inspection pattern.
REFERENCES:
patent: 2004/0032979 (2004-02-01), Honda et al.
patent: 2000-074649 (2000-03-01), None
patent: 2001-044253 (2001-02-01), None
patent: 2003-107022 (2003-04-01), None
English language abstract of the Japanese Publication No. 2000-074649.
English language abstract of the Japanese Publication No. 2001-044253.
English language abstract of the Japanese Publication No. 2003-107022.
Jee Yun-Jung
Jun Chung-Sam
Kim Tae-Kyoung
Yang Yu-Sin
Bella Matthew C.
Marger & Johnson & McCollom, P.C.
Rahmjoo Mike
Samsung Electronic Co. Ltd.
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