Method of forming a pattern, method of forming wiring,...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material

Reexamination Certificate

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C257S072000, C257SE21174, C257SE21582

Reexamination Certificate

active

07429530

ABSTRACT:
A method of forming a pattern of a functional layer on a surface of a substrate, where a pattern region, to which the pattern is provided, is edged with a boundary layer, and has a first region and a second region communicated with the first region and having a narrower width than the first region, the method includes: providing an intermediate layer having adhesiveness with the substrate and lyophilicity with a functional fluid to the first and the second regions; ejecting a droplet of the functional fluid to the first region; and allowing the droplet of the functional fluid ejected to the first region to automatically flow to the second region with the lyophilicity with the intermediate layer.

REFERENCES:
patent: 6303963 (2001-10-01), Ohtani et al.
patent: 7119026 (2006-10-01), Honda et al.
patent: 7129166 (2006-10-01), Speakman
patent: 2004/0048001 (2004-03-01), Kiguchi et al.
patent: 2005/0242394 (2005-11-01), Nakabayashi et al.
patent: 2003-315813 (2003-11-01), None
patent: 2004-095896 (2004-03-01), None

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