Method of forming a hard carbon film over an inner surface of a

Details Method of forming a hard carbon film over an inner surface of a Method of forming a hard carbon film over an inner surface of a

1999-03-05

2000-09-12

Beck, Shrive

Coating processes

Direct application of electrical, magnetic, wave, or...

Plasma

4272497, 427904, 427237, C23C 1626, H05H 124

Patent

active

061174963

ABSTRACT:
A hard carbon film is formed over an inner surface of a guide bush including the steps of fixing an auxiliary electrode support member for supporting an auxiliary electrode of a jig for forming a film in a center bore of the guide bush by an auxiliary electrode insulation member, disposing an auxiliary electrode in alignment with the axis of the center bore so as to face the inner surface, disposing legs, and a first electrode plate, a second electrode plate, and the insulation member which are fixed to the legs are placed on the bottom of a vacuum vessel placing the guide bush on the first electrode plate contacted electrically with a power source, while the projection of the auxiliary electrode support member projecting out of the auxiliary electrode insulation member is contacted electrically with the second electrode plate. The auxiliary electrode is grounded through the auxiliary electrode support member, the second electrode plate, the legs, and the vacuum vessel, a gas containing carbon is introduced into the vacuum vessel after evacuating the vacuum vessel, and a plasma is produced in the vacuum vessel by supplying electric power to the guide bush through the first electrode plate from the power source.

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