Method of forming a coating film

Details Method of forming a coating film Method of forming a coating film

1995-08-07

1997-12-09

Bell, Janyce

Coating processes

Centrifugal force utilized

427299, 4273855, B05D 312

Patent

active

056958170

ABSTRACT:
A method of forming a coating film, in which the coating film is formed by supplying a coating liquid onto a surface of a substrate, while the substrate housed in a processing vessel is rotated together with the processing vessel, includes the steps of coating the surface of the substrate with a solvent, supplying the coating liquid to the substrate, rotating the substrate and the processing vessel at a first rotation speed to diffuse the coating liquid on the surface of the substrate, closing the processing vessel with a lid to seal the substrate in the processing vessel, and rotating the processing vessel with the lid and the substrate at a second rotation speed to uniform a film thickness of the coating film.

REFERENCES:
patent: 4889069 (1989-12-01), Kawakami
patent: 5013586 (1991-05-01), Cavazza
patent: 5234499 (1993-08-01), Sasaki et al.
patent: 5571560 (1996-11-01), Lin

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