Method of forming a carbon nano-material layer using a...

Details Method of forming a carbon nano-material layer using a... Method of forming a carbon nano-material layer using a...

2004-06-03

2010-11-16

Cleveland, Michael (Department: 1712)

Coating processes

Coating by vapor, gas, or smoke

Carbon or carbide coating

C427S248100, C427S249600

Reexamination Certificate

active

07833580

ABSTRACT:
A method of forming a carbon nano-material layer may involve a cyclic deposition technique. In the method, a chemisorption layer or a chemical vapor deposition layer may be formed on a substrate. Impurities may be removed from the chemisorption layer or the chemical vapor deposition layer to form a carbon atoms layer on the substrate. More than one carbon atoms layer may be formed by repeating the method.

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Sumio Iijima, “Helical Microtubules of Graphitic Carbon”, Nature, vol. 354, pp. 56-58, Nov. 7, 1991.

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