Method of formation of coherent wavy nanostructures (variants)

Details Method of formation of coherent wavy nanostructures (variants) Method of formation of coherent wavy nanostructures (variants)

2011-07-12

2011-07-12

Richards, N Drew (Department: 2895)

Semiconductor device manufacturing: process

Coating of substrate containing semiconductor region or of...

C438S760000, C438S762000, C438S763000, C438S765000, C438S766000, C257SE21332

Reexamination Certificate

active

07977252

ABSTRACT:
The method for forming wavelike coherent nanostructures by irradiating a surface of a material by a homogeneous flow of ions is disclosed. The rate of coherency is increased by applying preliminary preprocessing steps.

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