Compositions – Barrier layer device compositions – Group vi element-containing
Patent
1987-10-13
1989-02-14
Stoll, Robert L.
Compositions
Barrier layer device compositions
Group vi element-containing
252 623V, 20419225, 437 24, 357 2, H01L 2912, H01L 4500, C23C 1400
Patent
active
048044903
ABSTRACT:
A method of stabilizing the switching characteristics of a thin film chalcogenide glass material by subjecting said material to a hydrogenated atmosphere, preferably activated hydrogen and argon. It is also preferred to provide a post hydrogenation anneal step.
REFERENCES:
patent: 4040917 (1977-08-01), Whittingham
patent: 4217374 (1980-08-01), Ovshinsky et al.
patent: 4375125 (1983-03-01), Byatt
patent: 4610731 (1986-09-01), Chevallier
Smeets et al., "Passivation of Silicon p-n Junctions by Sightly Conductive Chalcogenide Films", J. Electrochem. Soc.: Solid-State Science and Technology, Sep. 1977, pp. 1458-1459.
Formigoni Napolean P.
Klersy Patrick J.
Piontkowski Jerry A.
Pryor Roger W.
Energy Conversion Devices Inc.
Eng Adriana L.
Goldman Richard M.
Massaroni Kenneth M.
Siskind Marvin S.
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