Method of fabricating semiconductor device and system of...

Details Method of fabricating semiconductor device and system of... Method of fabricating semiconductor device and system of...

2005-05-24

2005-05-24

Lebentritt, Michael S. (Department: 2829)

Semiconductor device manufacturing: process

Radiation or energy treatment modifying properties of...

Reexamination Certificate

active

06897166

ABSTRACT:
A method of fabricating a semiconductor device capable of obtaining a high-density laser beam necessary for crystallizing a semiconductor layer or activating an impurity while miniaturizing a lens group provided on the outlet of an optical fiber member is provided. This method of fabricating a semiconductor device comprises steps of connecting a laser oscillator oscillating a near infrared laser beam and an irradiation optical system with each other through an optical fiber member having a single core part and heating a semiconductor layer by irradiating the near infrared laser beam from the irradiation optical system.

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