Method of fabricating semiconductor device

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer

Reexamination Certificate

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C438S164000, C257SE21415

Reexamination Certificate

active

07972912

ABSTRACT:
A method of fabricating a semiconductor device includes first providing an insulation substrate. A patterned conductive layer is formed over the insulation substrate, and the patterned conductive layer includes a channel region and a number of protruding regions. A gate structure layer is formed over the insulation substrate. The gate structure layer covers a part of the patterned conductive layer, and each of the protruding regions has an exposed region. A doping process is performed to dope at least the exposed region of the patterned conductive layer to form a number of S/D regions.

REFERENCES:
patent: 5986306 (1999-11-01), Nakajima et al.
patent: 7393733 (2008-07-01), Currie
patent: 2003/0066740 (2003-04-01), Inukai

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