Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate
2011-07-05
2011-07-05
Trinh, Michael (Department: 2822)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
On insulating substrate or layer
C438S164000, C257SE21415
Reexamination Certificate
active
07972912
ABSTRACT:
A method of fabricating a semiconductor device includes first providing an insulation substrate. A patterned conductive layer is formed over the insulation substrate, and the patterned conductive layer includes a channel region and a number of protruding regions. A gate structure layer is formed over the insulation substrate. The gate structure layer covers a part of the patterned conductive layer, and each of the protruding regions has an exposed region. A doping process is performed to dope at least the exposed region of the patterned conductive layer to form a number of S/D regions.
REFERENCES:
patent: 5986306 (1999-11-01), Nakajima et al.
patent: 7393733 (2008-07-01), Currie
patent: 2003/0066740 (2003-04-01), Inukai
Kung Chen-Pang
Lee Ming-Hsien
Lin Horng-Chih
Tseng Huai-Yuan
Industrial Technology Research Institute
Jianq Chyun IP Office
Trinh Michael
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