Method of fabricating reflective spatial light modulator...

Details Method of fabricating reflective spatial light modulator... Method of fabricating reflective spatial light modulator...

2011-04-12

2011-04-12

Coleman, W. David (Department: 2823)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

C359S233000

Reexamination Certificate

active

07923789

ABSTRACT:
The contrast offered by a spatial light modulator device may be enhanced by positioning nonreflective elements such as supporting posts and moveable hinges, behind the reflecting surface of the pixel. In accordance with one embodiment, the reflecting surface is suspended over and underlying hinge-containing layer by integral ribs of the reflecting material defined by gaps in a sacrificial layer. In accordance with an alternative embodiment, the reflecting surface is separated from the underlying hinge by a gap formed in an intervening layer, such as oxide. In either embodiment, walls separating adjacent pixel regions may be recessed beneath the reflecting surface to further reduce unwanted scattering of incident light and thereby enhance contrast.

REFERENCES:
patent: 5652671 (1997-07-01), Knipe et al.
Henley et al., “A New SOI Manufacturing Technology Using Atomic layer Cleaving.” Silicon Genesis Corporation Campbell CA. pp. 1-5, Fabtech.org, Jun. 1, 2000.

Affiliated with

Also associated with

Rating

Method of fabricating reflective spatial light modulator... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of fabricating reflective spatial light modulator..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of fabricating reflective spatial light modulator... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2686613