Method of fabricating organic electroluminescent devices

Details Method of fabricating organic electroluminescent devices Method of fabricating organic electroluminescent devices

2006-09-07

2008-12-30

Richards, N Drew (Department: 2895)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S082000, C438S099000, C438S725000, C438S780000

Reexamination Certificate

active

07470610

ABSTRACT:
A method of fabricating an organic EL device by which sealing films can be patterned, without using any wet process. The method has the steps of:preparing a substrate1on which a first electrode2has been formed and forming a laminated film7by laminating an organic layer3comprising a luminescent layer and a second electrode4on the first electrode2in this order;forming a first sealing film5which covers the whole region of the laminated film7;forming on the surface of the first sealing film5a second sealing film6having an opening pattern; andpatterning the first sealing film5by dry-etching the first sealing film5using the second sealing film6having the opening pattern as a mask.

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European Search Report dated Jul. 20, 2007 issued by European Patent Office for application No. 06120173.7-2111.

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