Method of fabricating near field optical probe

Details Method of fabricating near field optical probe Method of fabricating near field optical probe

2008-07-01

2008-07-01

Hoang, Quoc (Department: 2818)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

C257SE27006

Reexamination Certificate

active

11020180

ABSTRACT:
Provided is a method of fabricating a near-field optical probe adapted to a near-field scanning optical microscopy and a near-field information storage device, in which a cantilever and an optical tip are provided in one body and the optical tip is arranged to face the upper portion of the substrate. High-concentrated boron ions are implanted into an uppermost silicon layer of a silicon on insulator (SOI) substrate, and a silicon layer into which boron ions are implanted while the silicon inside the tip is etched to form the hole to act as an etch stop layer, thereby easily removing the silicon inside the tip even with the cantilever exposed, and simplifying the process due to the simultaneous fabrication of the cantilever and the tip.

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S.S. Choi, et al.; “Fabrication of Subwavelength-Size Aperture for a Near-Field Optical Probe Using Various Microfabrication Procedures”; J. Vac. Sci. Technol. B 21(1) Jan./Feb. 2003; pp. 118-122; American Vacuum Society.
Ki-Bong Song, et al.; “Fabrication of a High-Throughput Cantilever-Style Aperture Tip by the Use of the Bird's Beak Effect”; Japan. Journal of Applied1 Physics., vol. 42 (2003) pp. 4353-5356, Part 1, No. 7A, Jul. 2003.
Chunchieh Huang, et al.; “Fabrication of Ultrathin p++Silicon Microstructures Using Ion Implantation and Boron Etch-Stop”; Journal of Microelectromechanical Systems, vol. 10, No. 4, Dec. 2001.
P. Grabiec, et al., “SNOW/AFM Microprobe Integrated with Piezoresistive Cantilever Beam for Multifunctional Surface Analysis”; Microelectric Engineering 61-62 (2002) 971-986.
Nobuo Satoh, et al.; “Investigations of Local Properties by SNOW Combined with KFM Using a PZT Cantilever”; IEICE Trans. Electron., vol. e85-C, No. 12, Dec. 2002.
Gregor Schurmann, et al.; “Fabrication and Characterization of a Silicon Cantilever Probe with a an Integrated Quart-Glass (Fused-Silica) Tip for Scanning Near-Field Optical Microscopy”; Applied Optics, vol. 40, No. 28, Oct. 1, 2001.
Official Action for Japanese counterpart app. 2004-357138.
Ki-Bong Song et al.; “Fabrication of a High-Throughput Cantilever-Style Aperture Tip by the Use of the Bird's-Beak Effect”; The Japan Society of Applied Physics; Jul. 2003; vol. 42; pp. 4353-4356.

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