Method of fabricating heteroepitaxial microstructures

Details Method of fabricating heteroepitaxial microstructures Method of fabricating heteroepitaxial microstructures

2005-09-20

2005-09-20

Nhu, David (Department: 2818)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Responsive to electromagnetic radiation

C438S047000, C438S191000

Reexamination Certificate

active

06946317

ABSTRACT:
An efficient method of fabricating a high-quality microstructure having a smooth surface. The method includes detaching a layer from a base structure to provide a carrier substrate having a detached surface, and then forming a microstructure on the detached surface of the carrier substrate by depositing an epitaxial layer on the detached surface of a carrier substrate. Also included is a microstructure fabricated from such method.

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