Method of fabricating GaAs single crystal

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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1566161, 1566162, 1566163, 1566164, 15662076, 156DIG70, 252 6236A, C30B 1106

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active

050079794

ABSTRACT:
A method of fabricating an undoped or impurity-doped semi-insulating GaAs single crystal with the use of a silica boat comprises the steps of making a melt of GaAs in the silica boat except for a seed crystal, doping the melt with oxygen, maintaining the doped melt as it is for a predetermined period of time, solidifying the melt from the side opposite the seed crystal toward the seed crystal, seeding the melt when the melt attains a predetermined melt zone width on the seed crystal side, and moving the melt zone in the direction opposite the seed crystal for its solidification while keeping the melt zone width unchanged.

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patent: 4488930 (1984-12-01), Koe
Willardson et al., "Semiconductors and Semimetals, vol. 20, Semi-Insulating GaAs", Academic Press, Inc., New York, 1984, pp. 24-25.

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