Method of fabricating field emission array type light...

Details Method of fabricating field emission array type light... Method of fabricating field emission array type light...

2007-10-18

2010-12-14

Garber, Charles D (Department: 2812)

Semiconductor device manufacturing: process

Having biomaterial component or integrated with living organism

Reexamination Certificate

active

07851231

ABSTRACT:
A method of fabricating a field emission array type light emitting unit that includes a rear substrate including a plurality of cathodes and a plurality of carbon nanotube emitters on a front side, a front substrate including a plurality of anodes and a phosphor layer on a rear side, wherein the rear substrate and the front substrate are arranged at a distance apart from each other and a plurality of spacers are arranged between the rear substrate and the front substrate, the plurality of spacers being adapted to maintain constant the distance, the method includes producing a diffusion pattern by wet etching a front side of the front substrate.

REFERENCES:
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patent: 2006/0290288 (2006-12-01), Choi et al.
patent: 2007/0114434 (2007-05-01), Chang et al.
patent: 2007/0120459 (2007-05-01), Yang et al.
patent: 10-2003-0058212 (2003-07-01), None
patent: 10-2004-0044101 (2004-05-01), None

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