Method of fabricating back diffused bonded oxide substrates

Details Method of fabricating back diffused bonded oxide substrates Method of fabricating back diffused bonded oxide substrates

1988-12-09

1990-11-06

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437 62, 437 67, 437974, 148DIG12, H01L 2176

Patent

active

049686283

ABSTRACT:
A method including forming an alignment moat of a first depth on a first surface of a substrate and performing all backside processing, forming a first oxide layer on the first surface and oxide bonding it to a handling wafer by oxide bonding. The substrate is then thinned from a second surface opposite the first surface down to a thickness less than the depth of the alignment moat so the alignment moat is exposed at a third surface for front side processing.

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patent: 4309813 (1982-01-01), Hull
patent: 4312680 (1982-01-01), Hsu
patent: 4554059 (1985-11-01), Short et al.
patent: 4638552 (1987-01-01), Shimbo et al.
patent: 4784970 (1988-11-01), Solomon
patent: 4851078 (1989-07-01), Short et al.

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