Method of fabricating an active matrix substrate for liquid...

Details Method of fabricating an active matrix substrate for liquid... Method of fabricating an active matrix substrate for liquid...

2006-05-02

2006-05-02

Smoot, Stephen W. (Department: 2813)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

On insulating substrate or layer

C438S609000, C438S656000, C438S688000

Reexamination Certificate

active

07037766

ABSTRACT:
An active matrix substrate comprises a matrix array of TFTs. A double-layered film includes an under-layer of aluminum-neodymium (Al—Nd) alloy and an over-layer of high melting point metal. The double-layered film forms first interconnection lines for connection to the TFTs. A triple-layered film includes an under-layer of said high melting point metal, a middle-layer of said Al—Nd alloy and an over-layer of the high melting point metal. The triple-layered film forms second interconnection lines for connection to the TFTs.

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