Measuring and testing – Surface and cutting edge testing – Roughness
Reexamination Certificate
2005-05-03
2005-05-03
Cygan, Michael (Department: 2855)
Measuring and testing
Surface and cutting edge testing
Roughness
C250S306000, C250S307000
Reexamination Certificate
active
06886395
ABSTRACT:
A method of making a probe having a cantilever and a tip include providing a substrate having a surface and forming a tip extending substantially orthogonally from the surface. The method includes depositing an etch stop layer on the substrate, whereby the etch stop layer protects the tip during process. A silicon nitride layer is then deposited on the etch stop layer. An etch operation is used to release the cantilever and expose the etch stop layer protecting the tip. Preferably, the tip is silicon and the cantilever supporting the tip, preferably via the etch stop layer, is silicon nitride. A probe for a surface analysis instrument made according to the method includes a tip and a silicon nitride cantilever having a thickness defined during the deposition process.
REFERENCES:
patent: 4916002 (1990-04-01), Carver
patent: 5066358 (1991-11-01), Quate et al.
patent: 5399232 (1995-03-01), Albrecht et al.
patent: 5540958 (1996-07-01), Bothra et al.
patent: 5546375 (1996-08-01), Shimada et al.
patent: 5581083 (1996-12-01), Majumdar et al.
patent: 5838005 (1998-11-01), Majumdar et al.
patent: 5929438 (1999-07-01), Suzuki et al.
patent: 5969345 (1999-10-01), Williams et al.
patent: 6156216 (2000-12-01), Manalis et al.
patent: 6189374 (2001-02-01), Adderton et al.
patent: 6227519 (2001-05-01), Yagi et al.
patent: 6252226 (2001-06-01), Kley
patent: 6328902 (2001-12-01), Hantschel et al.
patent: 6337477 (2002-01-01), Shimada et al.
patent: 6408122 (2002-06-01), Shimada et al.
patent: 6487515 (2002-11-01), Ghoshal
patent: 20020066855 (2002-06-01), Choi et al.
patent: WO-9958925 (1999-11-01), None
Boyle Fredrickson Newholm Stein & Gratz S.C.
Cygan Michael
Veeco Instruments Inc.
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