Semiconductor device manufacturing: process – Forming bipolar transistor by formation or alteration of... – Self-aligned
Patent
1994-09-28
1997-09-02
Nguyen, Tuan H.
Semiconductor device manufacturing: process
Forming bipolar transistor by formation or alteration of...
Self-aligned
438675, 438681, H01L 2144
Patent
active
056630972
ABSTRACT:
A method of fabricating semiconductor devices comprises the following process of: forming an electrode leading out window having its vertical side wall at a given position in the functional element formed on a semiconductor substrate; forming an insulating film on the surface of the side wall; and depositing an electrode metal in the leading out window.
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Fujita Kei
Sakamoto Masaru
Canon Kabushiki Kaisha
Nguyen Tuan H.
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