Radiant energy – Inspection of solids or liquids by charged particles – Methods
Reexamination Certificate
2005-11-29
2005-11-29
Lee, John R. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Methods
C250S306000, C250S310000, C250S311000, C250S491100, C250S492100, C250S492200, C250S492220
Reexamination Certificate
active
06969852
ABSTRACT:
A method evaluating a measuring electron microscope, comprising the steps of setting such modes of operation of a microscope, that will be used for subsequent measurements of sizes and line edge roughness; introducing a test-object which has a known straight edge into a chamber of objects of the microscope; orienting the test object on a stage of the microscope; scanning the test object with an electron beam; obtaining an image of the edge of the test object and saving the image in a digital form; localizing the edge of the test object and saving the image in a digital form; localizing the edge of the test object on the image on each line of scanning; producing storing a set of values of a coordinate X(i) which correspond to a position of the edge of an i-th line of scanning; approximating the sets of values X(i) with a straight line; calculating deviations P(I) of coordinates X(i) from a straight line on each line of scanning; analyzing a set of values of the deviations Δ(i); calculating an Δaveand a maximal deviation Δmaxand if a maximum value of deviation Δmaxexceeds an acceptable tolerance of measurement, making a conclusion whether or not the microscope can be used for measurements and whether or not an adjustment is needed.
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Nikitin Arkady
Yeremin Dmitriy
General Phoshonix LLC
Ilya Zborovsky
Souw Bernard E.
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