Method of etching a surface of a substrate comprising LiTaO.sub.

Details Method of etching a surface of a substrate comprising LiTaO.sub. Method of etching a surface of a substrate comprising LiTaO.sub.

1976-12-17

1977-08-02

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156903, 252 793, H01L 21306

Patent

active

RE0293369

ABSTRACT:
A method of etching a surface of a substrate comprising lithium tantalate (LiTaO.sub.3) and chemically similar materials is disclosed. The method includes contacting the surface with a mixture comprising hydrofluoric acid and sulfuric acid. In addition to its etching action, the mixture is also capable of polishing the thus treated surface.

REFERENCES:
patent: 1777321 (1930-10-01), Meth
patent: 2847287 (1958-08-01), Landgren
patent: 3546037 (1970-12-01), Salzle
Applied Physics Letters, vol. 6, No. 11, 6-1-1965, by K. Nassau et al., pp. 228 and 229, (Etching of LiNbO.sub.3).
Journal of Applied Physics, Domain Structure and Curie Temperature of Single-Crystal Lithium Tantalate by H. J. Levinstein et al., 6-22-1966, pp. 4585 and 4586.

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