Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1990-09-05
1993-03-02
Dang, Thi
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156668, 156345, 20419233, 20429832, 356357, H01L 2100, G01B 902
Patent
active
051906147
ABSTRACT:
Methods and apparatus for enhancing the accuracy for detecting the endpoint of certain operations (such as etching, photoresist development or chemical reaction) in the processing of materials which results in a change in the reflectivity or refractive index of the material are provided. The methods decrease the sensitivity of endpoint detection to high frequency noise and periodic oscillations. The methods also allow accurate calculation of overprocessing time and real-time viewing of data by the user.
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patent: 4462860 (1984-07-01), Szmanda
patent: 4569717 (1986-02-01), Ohgami et al.
patent: 4842410 (1989-06-01), Darrah et al.
patent: 5081796 (1992-01-01), Schultz
Xinix Model 2200 Instruction Manual, Revision Feb. 1990, Copyright Mar. 1990 (entire manual).
Fowler Jewett W.
Leach Steven C.
Litvak Herbert E.
Thomson Mariste A.
Dang Thi
Luxtron Corporation
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