Radiant energy – Inspection of solids or liquids by charged particles – Methods
Patent
1983-08-04
1986-09-09
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Methods
250310, G01N 2300
Patent
active
046111190
ABSTRACT:
A method for emphasizing a portion of an area of a subject being scanned by a scanning microscope wherein a subject is scanned with a particle probe of the microscope moving at a given scanning speed along a line with a given space between lines and wherein the image is reproduced on the image recording device having a given scanning speed along each image line and a given spacing between the image lines characterized by enlarging selected portions of the image by selectively varying the scanning speed and spacing between the lines of at least one of the particle probe and image recording devices. The method enables producing an enlarged portion of an area of the subject being observed with the surrounding portions of the area being simultaneously produced to enable a significantly faster and more reliable discovery of the portion of the area of the subject which is of interest.
REFERENCES:
patent: 3628012 (1971-12-01), Plows et al.
patent: 3795808 (1974-03-01), Drayton et al.
patent: 4020343 (1977-04-01), Shimaya et al.
patent: 4071759 (1978-01-01), Namae
patent: 4431915 (1984-02-01), Nakagawa et al.
Fazekas Peter
Otto Johann
Anderson Bruce C.
Siemens Aktiengesellschaft
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