Method of electrically detecting biomolecule

Details Method of electrically detecting biomolecule Method of electrically detecting biomolecule

2006-02-02

2010-02-09

Liu, Sue (Department: 1639)

Semiconductor device manufacturing: process

Packaging or treatment of packaged semiconductor

Metallic housing or support

C438S048000, C438S049000, C438S056000, C438S257000, C435S006120, C257S256000

Reexamination Certificate

active

07659149

ABSTRACT:
Provided is a method of sensing biomolecules using a bioFET, the method including: forming a layer including Au on a gate of the bioFET; forming a probe immobilized on a substrate separated from the gate by a predetermined distance, and a biomolecule having a thiol group (—SH) which is incompletely bonded to the probe; reacting the probe with a sample including a target molecule; and measuring a current flowing in a channel region between a source and a drain of the bioFET.

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