Method of editing a semiconductor die

Active solid-state devices (e.g. – transistors – solid-state diode – Test or calibration structure

Reexamination Certificate

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C257S758000, C257SE21526, C257SE23179, C438S014000

Reexamination Certificate

active

07352001

ABSTRACT:
Resistance and capacitance are added to a prototype die to fix or identify performance issues with the integrated circuit formed in the die by forming a thin piece of silicon on the top surface of the die. For resistance, vias are formed to regions on the metal traces and to opposite ends of the piece of silicon using a FIB system. For capacitance, a dielectric is formed on the piece of silicon, and a layer of metal is formed on the dielectric. Vias are formed to regions on the metal traces, to the piece of silicon, and to the layer of metal using the FIB system.

REFERENCES:
patent: 5419807 (1995-05-01), Akram et al.
patent: 5789303 (1998-08-01), Leung et al.
patent: 6022750 (2000-02-01), Akram et al.
patent: 6100573 (2000-08-01), Lu et al.
patent: 6147857 (2000-11-01), Worley et al.
patent: 6211527 (2001-04-01), Chandler
patent: 6346302 (2002-02-01), Kishimoto et al.
patent: 6426556 (2002-07-01), Lin
patent: 6462427 (2002-10-01), Sakiyama et al.
patent: 6492261 (2002-12-01), Gavish et al.
patent: 6706584 (2004-03-01), List et al.
patent: 6763578 (2004-07-01), Farnworth et al.
patent: 6846717 (2005-01-01), Downey et al.
patent: 6911832 (2005-06-01), Kolachina et al.
patent: 2003/0049882 (2003-03-01), Yin et al.
Caiwen Yuan, et al., “Application of Focused Ion Beam In Debug And Characterization Of 0.13um Copper Interconnect Technology”, Proceedings From The 28th International Symposium For Testing And Failure Analysis, Nov. 3-7, 2002, Phoenix, Arizona, pp. 183-188.

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