Method of drawing a silicon rod

Details Method of drawing a silicon rod Method of drawing a silicon rod

1982-03-29

1984-10-02

Bernstein, Hiram H.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156DIG83, C30B 1510

Patent

active

044746415

ABSTRACT:
The invention relates to a method of drawing a monocrystalline silicon rod from a silicon melt contained in a quartz crucible. In the method according to the invention, the quartz crucible has an internal cross-section which decreases gradually downwards. This technique obtains silicon rods with an oxygen content which is constant throughout their length. Upon further processing the oxygen forms oxygen precipitates which are removed by gettering.

REFERENCES:
patent: 3582287 (1971-06-01), Capita
patent: 3929557 (1975-12-01), Goodrum
patent: 4344815 (1982-08-01), Cazarra et al.

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