Method of double patterning, method of processing a...

Details Method of double patterning, method of processing a... Method of double patterning, method of processing a...

2008-02-01

2011-10-25

Walke, Amanda C. (Department: 1722)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

C430S270100, C430S311000, C430S317000, C430S322000, C430S330000, C430S331000, C430S394000

Reexamination Certificate

active

08043794

ABSTRACT:
A method of double patterning is disclosed. The method includes forming a first photosensitive layer; exposing the first photosensitive layer using a first reticle; developing the first photosensitive layer thereby forming a first image pattern including first elements; forming a second photosensitive layer; exposing the second photosensitive layer using the first reticle; and developing the second photosensitive layer thereby forming a second image pattern.

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