Method of displaying diffraction pattern by electron microscope

Details Method of displaying diffraction pattern by electron microscope Method of displaying diffraction pattern by electron microscope

1985-06-10

1986-11-18

Fields, Carolyn E.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250311, 250396R, H01J 3726

Patent

active

046237836

ABSTRACT:
A method for large-angle convergent-beam diffraction comprises selecting a portion of the diffraction pattern formed by an objective lens, by the use of a diaphragm. Then, a portion of the electron micrograph which is formed by the electron beam passed through the diaphragm is detected, thus producing a signal. This enables a large-angle convergent-beam electron diffraction method that permits one to examine a specimen region which is much narrower than conventional.

REFERENCES:
patent: 3737659 (1973-06-01), Yanaka et al.
patent: 3993905 (1976-11-01), Mollenstedt
Journal of Electron Microscopy, vol. 29, Nos. 1-4 (1980) pp. 408-412 and Table of Contents.

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