Method of determining the endpoint of a planarization process

Details Method of determining the endpoint of a planarization process Method of determining the endpoint of a planarization process

2005-08-23

2005-08-23

Nguyen, Dung Van (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

With indicating

C451S005000, C451S006000, C451S296000

Reexamination Certificate

active

06932674

ABSTRACT:
A method of determining the endpoint of a planarizing process is disclosed. An endpoint detection signal is selectively sampled from at least one predetermined location within a planarizing region defined on a planarizing web. Planarization is stopped when the endpoint criterion based on the endpoint detection signal is detected.

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