Method of determining initial thickness value for sample...

Details Method of determining initial thickness value for sample... Method of determining initial thickness value for sample...

2008-04-22

2008-04-22

Punnoose, Roy M (Department: 2886)

Optics: measuring and testing

By polarized light examination

Of surface reflection

C356S630000, C250S559270

Reexamination Certificate

active

11326060

ABSTRACT:
A method of determining a starting value for thickness of the most influential layer in a mathematical model of a sample for use in a data fitting routine, supplemented by the use of ordinary or B-spline polynomials to represent at least one of the real and imaginary parts of optical constants in the mathematical model.

REFERENCES:
patent: 4999509 (1991-03-01), Wada et al.
patent: 5889592 (1999-03-01), Zawaideh
patent: 5953446 (1999-09-01), Opsal et al.
patent: 6278519 (2001-08-01), Rosencwaig et al.
“Multiple Minima in the Ellipsometric Error Function”, Alterovitz & Johs, Thin Solid Films, (1998).
“Simultaneous Measurement of Six layers in a Silicon Insulator Film Stack Using Spectrophotometry and Beam Profile Reflectometry”, Lang et al., J. App. Phys., 81(8) (1997).
“Parameter Correlation and Precision in Multiple-Angle Ellipsometry”, Bu-Abbud & Bashara, Applied Optics 20 (1981). “Overview of Variable Angle Spectroscopic Ellipsometry (VASE), Part 1: Basic Theory and Typical Applications”, Woollam et al. SPIE Proc CR72 (1999).
“Overview of Variable Angle Spectroscopic Ellipsometry (VASE), Part 1: Basic Theory and Typical Applications”, Woollam et al. SPIE Proc CR72 (1999).
“Effective Dielectric Function of Mixtures of Three or More Materials: a Numerical Procedure for Computation”, Bosch et al., Surface Science 453 (2000).
“Characterization of Multilayer GaAs/AlGaAs Transistor Structures by Variable Angle Spectroscopic Ellipsometry”, Merkle et al., Jap. J. of Appl. Phys. 28, (1989).
“Spectroellipsometric Characterization in Inhomogeneous Films”, Tirri et al., SPIE Proc. 794 (1987).
“High Precision UV-Visible-Near-IR Stokes Vector Spectroscopy”, Zettler et al., Thin Solid Films, 234 (1993).

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