Optics: measuring and testing – Lamp beam direction or pattern
Reexamination Certificate
2006-01-10
2006-01-10
Evans, F. L. (Department: 2877)
Optics: measuring and testing
Lamp beam direction or pattern
Reexamination Certificate
active
06985218
ABSTRACT:
A method of determining at least one parameter that is characteristic of the angular distribution of light illuminating an object in a projection exposure apparatus is described. This parameter may be, for example, a pupil asymmetry. The method comprises the step of inserting a filter element in or in close proximity of a pupil plane of an illumination system that is arranged between a light source and the object. The filter element has a filter function that varies in an azimuthal direction with respect to the optical axis of the illumination system. Then the intensity of the light in a plane downstream of the pupil plane is measured. After rotating the filter element around the optical axis by an angle Φ, the measurement of the intensity is repeated. From the filter function, the angle Φ and the measured intensities the parameter is measured.
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Copy of “Technische Optik” by G. Schröder,Vogel Buchverlag Würzburg, 1987, ISBN-3-8023-0067-X, pp. 62-66.
Remarks by Applicant relating to the relevance of the reference, “Technische Optik”.
Copy of International Search Report dated Sep. 29, 2003.
Carl Zeiss SMT AG
Evans F. L.
Young & Basile P.C.
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