Method of detecting measurement error in measurement system

Details Method of detecting measurement error in measurement system Method of detecting measurement error in measurement system

2006-04-11

2006-04-11

Chawan, Sheela (Department: 2623)

Image analysis

Applications

Manufacturing or product inspection

C382S100000, C250S306000, C250S252100, C356S401000

Reexamination Certificate

active

07027636

ABSTRACT:
A method of detecting measurement errors in a measurement system includes: a) imaging a pattern, the imaged pattern including a plurality of critical dimension measurement dots, and b) automatically detecting a non-smooth connection of the plurality of the critical dimension measurement dots.

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