Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
Reexamination Certificate
2011-08-09
2011-08-09
Smith, Matthew (Department: 2823)
Semiconductor device manufacturing: process
With measuring or testing
Electrical characteristic sensed
C257SE21531
Reexamination Certificate
active
07993942
ABSTRACT:
A method of detecting heavy metal in a semiconductor substrate, includes: a gate oxide film forming step of forming an organic oxide film by spin coating or a sol-gel process, and forming a metal/oxide film/semiconductor junction element by using a mercury probe method; and a step of detecting and quantifying heavy metal by calculating the surface concentration of the heavy metal from junction capacitance characteristics of the element.
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Enad Christine
Greenblum & Bernstein P.L.C.
Smith Matthew
Sumco Corporation
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