Method of detecting array of liquid crystal display and...

Details Method of detecting array of liquid crystal display and... Method of detecting array of liquid crystal display and...

2008-07-15

2008-07-15

Nguyen, Kiet T (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C324S701000

Reexamination Certificate

active

07399965

ABSTRACT:
A detection apparatus for detecting a defect in an array of a liquid crystal display, comprises a main chamber, a stage, a detection device and a main heater. The stage is disposed in the main chamber, and the array is placed on stage. The detection device is disposed in the main chamber and detects an electrical characteristic of the array. The main heater heats the array to a first temperature to reveal the defect of the array.

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Taiwan Search Report issued May 5, 2006.
Japan Office Action mailed Oct. 16, 2006.
JP Office Action mailed Feb. 8, 2007.

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