Method of detecting a substrate in a carrier head

Details Method of detecting a substrate in a carrier head Method of detecting a substrate in a carrier head

2005-02-22

2005-02-22

Eley, Timothy V. (Department: 3724)

Foundation garments

Breast or chest, e.g., brassieres

Combined with subjacent body supporters, e.g., foundation...

C451S287000, C451S288000, C451S397000, C451S398000

Reexamination Certificate

active

06857931

ABSTRACT:
A carrier head has a base, a flexible membrane, and a valve in the carrier head that forms part of a substrate detection system. The valve includes a valve stem that contacts an upper surface of the flexible membrane so that if a substrate is attached to the lower surface of the flexible membrane when the first chamber is evacuated, the valve is actuated to generate a signal to the substrate detection system.

REFERENCES:
patent: 4918869 (1990-04-01), Kitta
patent: 5193316 (1993-03-01), Olmstead
patent: 5205082 (1993-04-01), Shendon et al.
patent: 5423716 (1995-06-01), Strasbaugh
patent: 5449316 (1995-09-01), Strasbaugh
patent: 5584751 (1996-12-01), Kobayashi et al.
patent: 5624299 (1997-04-01), Shendon
patent: 5643053 (1997-07-01), Shendon
patent: 5643061 (1997-07-01), Jackson et al.
patent: 5759918 (1998-06-01), Hoshizaki et al.
patent: 5803799 (1998-09-01), Volodarsky et al.
patent: 5851140 (1998-12-01), Barns et al.
patent: 5879220 (1999-03-01), Hasegawa et al.
patent: 5899801 (1999-05-01), Tolles et al.
patent: 5957751 (1999-09-01), Govzman et al.
patent: 5961169 (1999-10-01), Kalenian et al.
patent: 5964653 (1999-10-01), Perlov et al.
patent: 6024630 (2000-02-01), Shendon et al.
patent: 6050882 (2000-04-01), Chen
patent: 6056632 (2000-05-01), Mitchel et al.
patent: 6093082 (2000-07-01), Somekh
patent: 6183354 (2001-02-01), Zuniga et al.
patent: 6244932 (2001-06-01), Govzman et al.
patent: 6343973 (2002-02-01), Somekh
patent: 6517415 (2003-02-01), Govzman et al.
patent: 6663466 (2003-12-01), Chen et al.
patent: 6705924 (2004-03-01), Somekh
patent: 0 841 123 (1998-05-01), None
patent: 0879 678 (1998-11-01), None
patent: 2243263 (1990-09-01), None
patent: WO 9907516 (1999-02-01), None
patent: WO 9933613 (1999-07-01), None

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