Method of detecting a pattern and an apparatus thereof

Details Method of detecting a pattern and an apparatus thereof Method of detecting a pattern and an apparatus thereof

2005-03-15

2005-03-15

Barlow, John (Department: 2863)

Data processing: measuring, calibrating, or testing

Calibration or correction system

Position measurement

Reexamination Certificate

active

06868354

ABSTRACT:
An alignment mark is sometimes undetectable even when part of it is visible with the eye. There is provided a pattern detecting method and an apparatus capable of detecting the alignment mark if part of it is visible. Thereby a position of the alignment mark can be detected. An image of a substantially whole of the alignment mark is registered as a representative image and besides at least one image of a part of the registered representative image is newly registered as a partial image. When any one of the registered representative image and the partial image is recognized. The pattern based on the alignment mark is detected. Thereby position coordinates can be recognized.

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