4. Radiant energy
  5. Photocells; circuits and apparatus
  6. Photocell controls its own optical systems

Shogo Kosuge

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Critical dimension measurement method and apparatus capable...

Optics: measuring and testing – Dimension – Width or diameter
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Method of detecting a pattern and an apparatus thereof

Data processing: measuring – calibrating – or testing – Calibration or correction system – Position measurement
Reexamination Certificate

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Microscope in-focus state detecting method and apparatus...

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Reexamination Certificate

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Size inspection/measurement method and size...

Data processing: measuring – calibrating – or testing – Measurement system – Dimensional determination
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2495815

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