Method of detecting a mark by an electron beam and an apparatus

Details Method of detecting a mark by an electron beam and an apparatus Method of detecting a mark by an electron beam and an apparatus

1979-11-26

1981-08-25

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250310, 250492A, G01N 2300

Patent

active

042861543

ABSTRACT:
This invention relates to a method of detecting a mark by an electron beam, the mark being provided on a sample, which includes the steps of scanning the electron beam over an area of the mark in such a manner that the electron beam is subjected to chopping by sampling pulses having a higher frequency than the scanning frequency, eliminating a component of noise from a detected signal representative of the mark, synchronously rectifying the detected mark signal, binary-coding the detected mark signal as compared with a suitable threshold value, and detecting a position of the mark by using the binary-coded signal.

REFERENCES:
patent: 3535516 (1970-10-01), Munakata
patent: 4063091 (1977-12-01), Gee

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