Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Patent
1998-06-30
2000-12-12
Duda, Kathleen
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
430313, 134 2, 216 41, 216103, 427 96, G03F 700
Patent
active
061596639
ABSTRACT:
A method for creating a solderable metal layer on a ceramic, glass, or glass ceramic member is described. The described method deposits an aluminum containing mixture on the member by ion vapor deposition creating a metalized ceramic member. A photoresist is applied to the metalized ceramic member. A photomask is applied to the photoresist and the photoresist is exposed to light. After the photomask and exposed photoresist are stripped off, the underlying aluminum containing mixture is removed with an etchant. The remaining photoresist is removed and a metal corrosion inhibiting layer is deposited on the remaining aluminum containing mixture. A solderable layer is then deposited on the metal corrosion inhibiting layer.
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Murray, Sr. James R.
Osmat Burhan
Duda Kathleen
Intersil Corporation
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