Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1989-06-29
1990-06-26
Pianalto, Bernard D.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
156643, 156646, 2041921, 427 451, 427294, B05D 306
Patent
active
049370944
ABSTRACT:
A method of forming a high flux of activated species, such as ions, of an energy transferring gas by employing a substantial pressure differential between a first conduit in which the energy transferring gas is introduced into a vacuumized enclosure and the background pressure which exits in said enclosure. In one embodiment, the flow rate of the energy transferring gas flowing through said first conduit, when taken in conjunction with said pressure differential, causes the high flux to activated species of the energy transferring gas to collide with a precursor deposition/etchant gas, remotely introduced into the enclosure through a second conduit, for forming deposition/etchant species therefrom. In an alternate embodiment, the pressure differential causes those activated species, themselves, to be either deposited upon or etched away from the surface of a remotely positioned substrate.
Doehler Joachim
Dotter II Buddie
Hudgens Stephen J.
Krisko Annette
Krisko Jeffrey M.
Energy Conversion Devices Inc.
Goldman Richard M.
Massaroni Kenneth M.
Pianalto Bernard D.
Siskind Marvin S.
LandOfFree
Method of creating a high flux of activated species for reaction does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of creating a high flux of activated species for reaction, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of creating a high flux of activated species for reaction will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1124873