Method of correcting non-uniform diffraction efficiency in a bin

Details Method of correcting non-uniform diffraction efficiency in a bin Method of correcting non-uniform diffraction efficiency in a bin

1994-12-27

1996-02-27

Loney, Donald J.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making named article

264 17, 264 19, 156 99, 359569, 359573, 359576, G03C 500, B29D 1100, G02B 518

Patent

active

054947839

ABSTRACT:
A first binary diffractive optical element has a multi-level surface relief phase grating structure on a substrate. The first binary diffractive optical element can be divided into regions commensurate with resolution requirements of the intended optical application and the diffraction efficiency of each region of the binary diffractive optical element measured. The lowest measured diffraction efficiency for a region of the first binary diffractive optical element will be taken as the reference efficiency. The diffraction efficiencies for all the regions of the binary diffractive optical element will be reduced region by region to the common value of the lowest measured diffraction efficiency by introducing compensating diffractive losses to the regions by a second, corrector binary diffractive optical element which has a binary surface relief phase grating structure on a substrate. By closely spacing the two binary diffractive optical elements in the optical path of an incident light beam, the resulting diffracted beam will have a uniform diffraction efficiency.

REFERENCES:
patent: 4895790 (1990-01-01), Swanson et al.
patent: 5208701 (1993-05-01), Maeda
patent: 5214535 (1993-05-01), Harris et al.
W. Veldkamp & T. McHugh, "Binary Optics", Scientific American, vol. 266, No. 5, May 1992, pp. 92-97.
G. J. Swanson, "Binary Optics Technology: The Theory and Design of Multi-Level Diffractive Optical Elements", Lincoln Laboratory, Massachusetts Institute of Technology, Technical Report 854, 14 Aug. 1989.

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