Method of correcting error arising in current-imaging tunneling

Details Method of correcting error arising in current-imaging tunneling Method of correcting error arising in current-imaging tunneling

1991-12-23

1992-12-15

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

G01N 23225

Patent

active

051719932

ABSTRACT:
The spacing between the probe tip of a scanning tunneling microscope and a sample is maintained constant. A bias voltage circuit produces a bias voltage that is swept across zero volts. Voltages corresponding to the resulting tunneling currents are detected in synchronism with the sweep of the bias voltage applied to the sample. A control unit takes in the output voltage from a curent-to-voltage converter circuit while the bias voltage is being swept. At this time, an error-correcting means accepts the voltage which is detected when the bias voltage is zero volts. This voltage is taken as an error voltage. After the completion of the collection of data, the error-correcting means subtracts the error voltage from all the collected data to correct the data. Where the bias voltage is swept not across zero volts, the voltage which would be detected when the bias voltage was zero volts is calculated by interpolation or extrapolation. The calculated voltage is taken as an error voltage. This error voltage is subtracted from all the data to correct the data.

REFERENCES:
patent: 5025153 (1991-06-01), Okada et al.
"Surface Electronic Structure of Si(111)-7.times.7) Resolved in Real Space", R. J. Hamers, R. M. Tromp and J. E. Demuth, Physical Review Letters, vol. 56, No. 18, May 5, 1986, pp. 1972-1975.

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