Method of correcting azimuth angle of photometric ellipsometers

Details Method of correcting azimuth angle of photometric ellipsometers Method of correcting azimuth angle of photometric ellipsometers

1986-10-29

1989-06-06

Wan, Gene

Optics: measuring and testing

By polarized light examination

Of surface reflection

G01J 400

Patent

active

048376035

ABSTRACT:
Method of correcting the azimuth angle of a photometric ellipsometer in which accurate ellipsometric parameters .PSI. and .DELTA. can be simply and readily obtained by measuring by means of a suitable method the errors in the azimuth angle of a polarizer assembly or a polarizer and an analyzer system or an analyzer and subtracting the error value from the actually measured value.

REFERENCES:
patent: 4585348 (1986-04-01), Chastang et al.
K. Riedling, "Evaluation of Adjustment Data for Simple Ellipsometers", Thin Solid Films, 61(1979), Aug. 15, 1979, Institut fuer Elektrotechnik Technische Universitaet Wien.

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